| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of NOx sensors capable of preventing the electrodes of a detection cell from being contaminated by Au evaporated during manufacturing. SOLUTION: At the time of manufacturing an NOx sensor 1 formed of a sample gas chamber 161 formed of a reference gas chamber 151, a detection cell 130, and a substrate 17, a main body part 12 formed of the detection cell 130 for detecting NOx concentration provided between both of them, a pump cell body 11 arranged in a position facing the sample gas chamber 161 and provided with a pump cell 110 for discharging and introducing oxygen gas into the sample gas chamber 161, the main body part 12 and pump cell body 11 are separately formed, then separately baked, and integrated into one body afterwards. |
