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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH113997(A)
申请公布日期
1999.01.06
申请号
JP19970168167
申请日期
1997.06.10
申请人
SONY CORP
发明人
KUBOTA MICHITAKA
分类号
H01L21/28;H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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