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发明名称
SEMICONDUCTOR DEVICE AND DESIGN TECHNIQUE OF SEMICONDUCTOR MATERIAL
摘要
申请公布号
JPH113943(A)
申请公布日期
1999.01.06
申请号
JP19970154080
申请日期
1997.06.11
申请人
SEIKO EPSON CORP
发明人
ONO YOSHITERU
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/118;(IPC1-7):H01L21/82
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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