| 摘要 |
PROBLEM TO BE SOLVED: To enhance sensitivity to displacement for detection. SOLUTION: This sensor includes a driving vibrator 8 which is supported on a base by a first beam 9 anchored by anchor parts 3 and which is driven in the direction of X-axis parallel to the base by a driving comb-tooth electrode 12, a detecting vibrator 10 which is supported on the driving vibrator 8 by a second beam 11 and which can vibrate in the direction of Y-axis parallel to the base, and capacitance type detecting electrodes 14, 15 provided at an interval to the detecting vibrator 10 along the direction of X-axis, and the sensor detects an angular velocity whose axis extends in the direction of Z-axis perpendicular to the base. Further, the driving vibrator 8 is secured to the base by the two anchor parts 3 arranged in symmetrical positions with respect to the detecting vibrator 11. The detecting electrodes 14, 15 are arranged at equal intervals, one on the detecting vibrator 10, and the other on the driving vibrator 8. |
