TEMPERATURE REGULATOR OF SEMICONDUCTOR SUBSTRATE,申请号JP19970156447-传众专利搜索

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发明名称	TEMPERATURE REGULATOR OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH113893(A)	申请公布日期	1999.01.06
申请号	JP19970156447	申请日期	1997.06.13
申请人	ORION MACH CO LTD	发明人	KOBAYASHI RYOJI
分类号	H01L21/205;H01L21/027;H01L21/324;(IPC1-7):H01L21/324	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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