| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce burden on a plant exhaust system, by circulating and reusing an atmosphere in a liquid treatment device enclosed with a casing, without discharging to the plant exhaust system, etc. SOLUTION: Atmospheres in a casing 61 of a development process device DEV1 and a casing 71 of a resist liquid coating device COT1 are introduced from an exhaust pipe 81 through an introduction pipe 50 into a filter device 101. The air cleaned and controlled in temperature and relative humidity in the filter device 101 containing a liquid-vapor contact space is returned from a delivery pipe 51 through a wall duct 46 to the inside of the casings 61 and 71.</p> |
