| 摘要 |
PROBLEM TO BE SOLVED: To correct longitudinal and transversal magnification components, by providing a longitudinal and transversal magnification correcting mechanism which can generate an arbitrary projection magnification between one axis in a plane of projection and another axis perpendicular to the axis against a stepper and, at the same time, can arbitrarily set the directions of the axes. SOLUTION: In a longitudinal and transversal magnification correcting mechanism 5, an actuator 52 which bends a parallel flat plate 51 by an arbitrary bending amount is placed on aθ-stage 53 which can be rotated around the optical axis 6a of a projection lens, and aθ-driving motor 55 which rotates the stage 53 by a designated angle is fixed on a supporting base 54. When the plate 51 is symmetrically with respect to a specific axis (α-axis), a primary enlarging or reducing magnification change can be given in theβ-axis direction which is perpendicular to theα-axis without giving any influence on theα-axis direction and, when the whole body of the mechanism 5 is rotated around the optical axis 6a by controlling the bending amount (h) of the plate 51 a as a variable amount, theα-axis can be made coincident with an arbitrary direction while the longitudinal and transversal magnifications are controlled. Therefore, longitudinal and transversal magnification components can be corrected. |
