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发明名称
PRODUCTION OF SPUTTER FILM AND SPUTTER FILM
摘要
申请公布号
JPH111769(A)
申请公布日期
1999.01.06
申请号
JP19970167933
申请日期
1997.06.10
申请人
CANON INC
发明人
SAWAMURA MITSUHARU
分类号
C23C14/34;H01L21/205;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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