| 摘要 |
PROBLEM TO BE SOLVED: To provide a small, high-sensitivity angular velocity sensor which allows easy electrical adjustments. SOLUTION: In this angular velocity sensor, the parts of vibrators 9, 10 extending from the ends of a beam part 12 are used as electrodes 4a, 4b for vibrators and electrodes 4c, 4d for the vibrators, and adjustment electrodes 2a-2d, 3a-3d are provided in positions opposite to weight parts 11 sandwiching the electrodes 4a-4d and the beam part 12. The adjustment electrodes 2a-2d, 3a-3d extend in the perpendicular direction to the direction of excitation by an excitation means (drive circuit) located in a known drive/detection means and to the direction of vibration detected by a vibration detecting means (detector circuit) and are installed in connection with an external conductor to adjust an electrostatic attracting force value through the application of a DC voltage between the electrodes 4a-4d. Fixed gaps are secured between the electrodes 4a, 4b, the electrodes 4c, 4d, and the adjustment electrode 2a-2d, 3a-3d by the presence of a plurality of slits 11 -120 . |
