LINEARLY DRIVING DEVICE AND SUBSTRATE-CARRYING DEVICE PROVIDED WITH IT

摘要

PROBLEM TO BE SOLVED: To provide a linearly driving device from which dust produced in its driving section is not discharged to the outside and a substrate-carrying device. SOLUTION: A linear motor 10 is housed in a hollow housing cover 2, and an annular belt 3 is put around rollers so as to surround the periphery of the motor section 10. The belt 3 is made of a magnetic material and positioned, so as to close the openings 8a and 8b of the cover 2. A magnetic fluid seal is put in a gap 16 between the belt 3 and cover 2. The magnetic fluid seal prevents dust from being discharged to the outside through the gap 16 between the belt 3 and the cover 2.