| 摘要 |
PROBLEM TO BE SOLVED: To reduce amount of generated refuse and avoid membranaceous defection, by mounting a cam to an actuator, providing a shaft with a cam follower fit for a groove of the cam, placing a valve element combining with the upper part of the shaft in a chamber, and providing the valve element with an elastic part, a stopper, and bellows. SOLUTION: Sliders 3 are combined with actuators 2a, 2b. Parallel grooves are formed on first cams 4a, 4b, and inclined grooves are formed on second cams 5a, 5b. First cam followers 6a, 6b fit to grooves on the first cams 4a, 4b, and second cam followers 6c, 6d fit to grooves on the second cams 5a, 5b are provided. A first shaft 9a and a second shaft 9b are combined with a valve element 10, the actuators 2a, 2b, a guide rail, and a chamber are combined with abase. The chamber, the first shaft 9a, bellows 13a, 13b, and a stopper 14 are provided. This prevents particle generation and membranaceous defection. |
