发明名称 Filament for ion implanter plasma shower
摘要 A ribbon filament (86) is provided for a thermionic emission device. The filament comprises an elongated body having a configuration defined by a length, a width, and a thickness. The length comprises a central portion (96) and first and second end portions (98) on either side of the central portion. The width of the central portion is greater than that of the first and second end portions. In addition, the thickness of the filament is substantially less than the width along its entire length. The ribbon filament (86) may be configured as a single helical coil having its first and second end portions (98) mounted to first and second legs (85), respectively, at locations of slots therein. Preferably, the filament (86) is comprised of tungsten and the first and second legs (85) are also comprised of tungsten.
申请公布号 US5856674(A) 申请公布日期 1999.01.05
申请号 US19970931689 申请日期 1997.09.16
申请人 EATON CORPORATION 发明人 KELLERMAN, PETER L.
分类号 G21K5/04;H01J1/16;H01J37/02;H01J37/06;H01J37/08;(IPC1-7):H01J37/317 主分类号 G21K5/04
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