发明名称 |
Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge |
摘要 |
An atomic force microscope (AFM) uses a spin valve magnetoresistive strain gauge formed on the AFM cantilever to detect deflection of the cantilever. The spin valve strain gauge operates in the absence of an applied magnetic field. The spin valve strain gauge is formed on the AFM cantilever as a plurality of films, one of which is a free ferromagnetic layer that has nonzero magnetostriction and whose magnetic moment is free to rotate in the presence of an applied magnetic field. In the presence of an applied stress to the free ferromagnetic layer due to deflection of the cantilever, an angular displacement of the magnetic moment of the free ferromagnetic layer occurs, which results in a change in the electrical resistance of the spin valve strain gauge. Electrical resistance detection circuitry coupled to the spin valve strain gauge is used to determine cantilever deflection.
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申请公布号 |
US5856617(A) |
申请公布日期 |
1999.01.05 |
申请号 |
US19970922210 |
申请日期 |
1997.09.02 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GURNEY, BRUCE ALVIN;MAMIN, HARRY JONATHON;RUGAR, DANIEL;SPERIOSU, VIRGIL SIMON |
分类号 |
G01B7/24;G01B7/34;G01Q20/00;G01Q60/24;G11B9/00;(IPC1-7):G01B7/24;G01R33/02 |
主分类号 |
G01B7/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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