发明名称 |
Film or coating deposition on a substrate |
摘要 |
A method of depositing a material onto a substrate, comprising the steps of: feeding a material solution to an outlet to provide a stream of droplets of the material solution; applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet towards the substrate such that a corona discharge is formed around the outlet; heating the substrate to provide an increase in temperature between the outlet and the substrate; and progressively increasing the temperature of the substrate during material deposition. |
申请公布号 |
AU7666098(A) |
申请公布日期 |
1998.12.30 |
申请号 |
AU19980076660 |
申请日期 |
1998.05.28 |
申请人 |
IMPERIAL COLLEGE OF SCIENCE, TECHNOLOGY AND MEDICINE |
发明人 |
KWANG-LEONG CHOY |
分类号 |
C23C26/00;B05B5/08;B05D1/04;C23C4/12;C23C16/448 |
主分类号 |
C23C26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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