METHOD FOR MAKING A NON-STICKING DIAMOND-LIKE NANOCOMPOSITE

摘要

The invention relates to an improved non-sticking diamond-like nanocomposite composition comprising networks of a-C:H and a-Si:O wherein the Hconcentration is between 85 % and 125 % of the C-concentration. The composition comprises preferably 25 to 35 at% of C, 30 to 40 at% of H, 25 to 30 at% of Si and 10 to 15 at% of O. The invention relates also to a process for coating a substrate in a vacuum chamber with such a composition and to its use e.g. to cover surfaces of moulding means.