| 摘要 |
A pattern inspecting method by which superposed patterns formed on a wiring board or a printed matter can be inspected simultaneously and a device for the pattern inspection. The pattern inspecting device is composed of a line sensor (10), an imaging unit (11), a detected image storage unit (12), a judgement unit (13), a judgement result output unit (14), a reference data storage unit (15), a reference data automatic generating unit (16), an illuminating unit (17), an illuminating/imaging control unit (18), an NC driving unit (19), and an NC table (20). The imaging unit (11) A/D converts the image signal of a board (21) such as a reference board or an inspection board to produce a reference pattern image or an inspection pattern image. The reference data automatic generating unit (16) generates the reference data automatically from the reference pattern image in accordance with reference data generating condition parameters. The judgement unit (13) compares the inspection image data stored in the detected image storage unit (12) with the reference data stored in the reference data storage unit (15) to detect any defect of the pattern and judges whether the board is acceptable or not.
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