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发明名称
A COMPOUND PLASMA CONFIGURATION, AND METHOD AND APPARATUS FOR GENERATING A COMPOUND PLASMA CONFIGURATION
摘要
申请公布号
EP0876663(A4)
申请公布日期
1998.12.30
申请号
EP19960935996
申请日期
1996.09.24
申请人
KOLOC, PAUL M.
发明人
KOLOC, PAUL M.
分类号
G21B1/11;H05H1/02;H05H1/04;H05H1/24;H05H1/54;(IPC1-7):G21B1/00
主分类号
G21B1/11
代理机构
代理人
主权项
地址
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