发明名称 METHOD AND DEVICE FOR PRODUCING ELECTRICALLY CONDUCTIVE CONTINUITY IN SEMICONDUCTOR COMPONENTS
摘要 The invention relates to a method and device for producing electrically conductive continuity in semiconductor components, preferably mounted on a semiconductor, by means of thermomigration, wherein a temperature gradient between two opposing surfaces of the semiconductor component is produced and a conductive dopant is applied on the cooler surface. One surface of the semiconductor is arranged on a cooled sampling and the opposite surface is exposed to heat radiation whose total output and power distribution can be regulated on the surface of the semiconductor. The total output and/or power distribution of the heat radiation is regulated depending on the temperature measured on at least one measuring point on the semiconductor or the semiconductor component.
申请公布号 WO9859098(A2) 申请公布日期 1998.12.30
申请号 WO1998DE01768 申请日期 1998.06.22
申请人 DR. JOHANNES HEIDENHAIN GMBH;SILICON SENSOR GMBH;KRIEGEL, BERND;KUDELLA, FRANK;ARNOLD, RENE 发明人 KRIEGEL, BERND;KUDELLA, FRANK;ARNOLD, RENE
分类号 H01L23/52;H01L21/00;H01L21/22;H01L21/225;H01L21/3205;H01L21/768;H01L31/02;H01L31/10 主分类号 H01L23/52
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