发明名称 |
METHOD AND DEVICE FOR PRODUCING ELECTRICALLY CONDUCTIVE CONTINUITY IN SEMICONDUCTOR COMPONENTS |
摘要 |
The invention relates to a method and device for producing electrically conductive continuity in semiconductor components, preferably mounted on a semiconductor, by means of thermomigration, wherein a temperature gradient between two opposing surfaces of the semiconductor component is produced and a conductive dopant is applied on the cooler surface. One surface of the semiconductor is arranged on a cooled sampling and the opposite surface is exposed to heat radiation whose total output and power distribution can be regulated on the surface of the semiconductor. The total output and/or power distribution of the heat radiation is regulated depending on the temperature measured on at least one measuring point on the semiconductor or the semiconductor component. |
申请公布号 |
WO9859098(A2) |
申请公布日期 |
1998.12.30 |
申请号 |
WO1998DE01768 |
申请日期 |
1998.06.22 |
申请人 |
DR. JOHANNES HEIDENHAIN GMBH;SILICON SENSOR GMBH;KRIEGEL, BERND;KUDELLA, FRANK;ARNOLD, RENE |
发明人 |
KRIEGEL, BERND;KUDELLA, FRANK;ARNOLD, RENE |
分类号 |
H01L23/52;H01L21/00;H01L21/22;H01L21/225;H01L21/3205;H01L21/768;H01L31/02;H01L31/10 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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