发明名称 ORGANOSILICON NANOCLUSTER AND PROCESS FOR PRODUCING THE SAME
摘要 An organosilicon nanocluster; a method of synthesizing the same; thin silicon and silicon oxide films comprising the same; and a high-performance semiconductor device containing these. This organosilicon nanocluster is soluble in an organic solvent and has a band gap of from 3 to 1.2 eV as determined from Tauc plots for the solution.
申请公布号 WO9858936(A1) 申请公布日期 1998.12.30
申请号 WO1998JP01382 申请日期 1998.03.27
申请人 HITACHI, LTD.;MIWA, TAKAO;WATANABE, AKIRA;ITOU, OSAMU;SUZUKI, MASAO 发明人 MIWA, TAKAO;WATANABE, AKIRA;ITOU, OSAMU;SUZUKI, MASAO
分类号 G02B6/12;H01L21/20;H01L21/312;H01L21/316;H01L51/30 主分类号 G02B6/12
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