| 摘要 |
The invention relates to a device for producing microwave plasma with a microwave generator (1), a microwave guiding chamber (2), and a plasma chamber (5) optionally comprising recipients, wherein chamber (2) is configured as a cylinder. Preferably, all or part of the cylindrical chamber (2) is encompassed by the plasma chamber (5). The coupling points are arranged in a common wall, preferably in the form of slotted couplers.
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