发明名称 POD MONITOR FOR USE IN A CONTROLLED ENVIRONMENT
摘要 A system including a pod for carrying and storing objects and a device for monitoring the environment inside the pod and providing notification if the environment becomes less than desired. The monitoring device includes a sensor bundle connected to the pod for measuring the environment inside the pod and converting the measurements to electrical signals. The electrical signals are then provided to a logging device which stores them for later retrieval or transmission. If the electrical signals indicate an undesired environment, a signaling device may transmit a notification to an external system.
申请公布号 WO9859229(A2) 申请公布日期 1998.12.30
申请号 WO1998US12982 申请日期 1998.06.23
申请人 GENCO, ROBERT, M.;HENRY, STEVEN, J. 发明人 GENCO, ROBERT, M.;HENRY, STEVEN, J.
分类号 H01L21/673;H01L21/677 主分类号 H01L21/673
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