发明名称 |
Quinonediazide positive photoresist utilizing mixed solvent consisting essentially of 3-methyl-3-methoxy butanol and propylene glycol alkyl ether acetate |
摘要 |
A photosensitive positive working photosensitive composition suitable for use as a photoresist, which comprises an admixture of at least one water insoluble, aqueous alkali soluble, film forming novolak resin; at least one o-diazonaphthoquinone photosensitizer; and a photoresist solvent mixture comprising a propylene glycol alkyl ether acetate and 3-methyl-3-methoxy butanol and process for producing such a composition.
|
申请公布号 |
US5853947(A) |
申请公布日期 |
1998.12.29 |
申请号 |
US19950576748 |
申请日期 |
1995.12.21 |
申请人 |
CLARIANT FINANCE (BVI) LIMITED |
发明人 |
WANAT, STANLEY F.;RAHMAN, M. DALIL;KHANNA, DINESH N.;AUBIN, DANIEL P.;DIXIT, SUNIT S. |
分类号 |
G03F7/004;G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/023;G03C1/61 |
主分类号 |
G03F7/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|