发明名称 METHOD FOR MANUFACTURING A GRAIN BOUNDARY TYPE JOSEPHSON JUNCTION DEVICE
摘要 The present invention relates to a method for manufacturing a grain boundary type Josephson junction device, in which a step is formed on a deposition surface of a substrate for depositing a thin film on it. According to the method, the step is formed by etching a portion of the deposition surface of the substrate by emitting a laser beam to the portion.
申请公布号 CA2143522(C) 申请公布日期 1998.12.29
申请号 CA19952143522 申请日期 1995.02.27
申请人 发明人 NAGAISHI, TATSUOKI
分类号 H01L21/302;H01L39/24;(IPC1-7):H01L21/268;H01L21/304 主分类号 H01L21/302
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