发明名称 Composition for anti-reflection coating
摘要 Disclosed herein is a composition for anti-reflection coating which comprises a perfluoroalkyl sulfonic acid, an organic amine, a polyvinyl pyrrolidone, a water-soluble alkylsiloxane polymer, and water. The composition is able to be an anti-reflection coating film which has a low refractive index, reduces the degree of forming insoluble layer, and does not generate fine particles and minute crystalline matters in its surface layer.
申请公布号 US5853471(A) 申请公布日期 1998.12.29
申请号 US19970838665 申请日期 1997.04.09
申请人 HOECHST JAPAN LIMITED 发明人 YOSHIDA, TAKEO;TANAKA, HATSUYUKI
分类号 G03F7/11;C09D5/00;C09D7/12;C09D137/00;C09D139/06;C09D183/04;C09D183/06;G03F7/004;G03F7/09;H01L21/027;(IPC1-7):C09D5/33;G03C1/73 主分类号 G03F7/11
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