MULTIPROBE CANTILEVER FOR SCANNING PROBE MICROSCOPE

摘要

FIELD: nanotechnology equipment; analysis, measurement, and modification of object surfaces in tunnel and atomic-power modes. SUBSTANCE: cantilever has base that mounts arbitrarily shaped beams whose distant ends carry needles; ends of the latter lie in same plane; vibration frequency of each beam differs from that of other beams. Distance between adjacent scanning needles of cantilever is brought to minimum. EFFECT: improved dynamic measurement range and reduced response to stray effects (temperature, electric properties of medium, etc). 4 cl, 3 dwgl