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发明名称
Verfahren zur Korpuskularstrahl-Prüfung von Substraten für Flüssigkeitskristallanzeigen (LCD)
摘要
申请公布号
DE59209561(D1)
申请公布日期
1998.12.24
申请号
DE19925009561
申请日期
1992.07.13
申请人
ETEC EBT GMBH, 85622 FELDKIRCHEN, DE
发明人
BRUNNER, MATTHIAS, DR., W-8011 KIRCHHEIM, DE;SCHMITT, REINHOLD, DIPL.-ING., W-8000 MUENCHEN 83, DE
分类号
G01R31/302;G01R31/305;G01R31/308;(IPC1-7):G01R31/305
主分类号
G01R31/302
代理机构
代理人
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