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经营范围
发明名称
Herstellung von Ausrichtmarken für holographische Lithographie
摘要
申请公布号
DE69322115(D1)
申请公布日期
1998.12.24
申请号
DE19936022115
申请日期
1993.03.12
申请人
HOLTRONICS TECHNOLOGIES LTD., MARIN, CH
发明人
OMAR, BASIL ARTHUR, C/O HOLTRONIC TECHNOLOGIES LTD, CH-2074 MARIN, CH
分类号
G03F9/00;(IPC1-7):G03F9/00
主分类号
G03F9/00
代理机构
代理人
主权项
地址
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