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发明名称
摘要
申请公布号
JP2841745(B2)
申请公布日期
1998.12.24
申请号
JP19900164094
申请日期
1990.06.25
申请人
TOTSUPAN INSATSU KK
发明人
SUZUKI TATSUO
分类号
G03F7/20;G03F9/00;H01L21/027;H01L21/30;H05K3/00;(IPC1-7):G03F9/00
主分类号
G03F7/20
代理机构
代理人
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