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发明名称
摘要
申请公布号
JP2841398(B2)
申请公布日期
1998.12.24
申请号
JP19880308202
申请日期
1988.12.05
申请人
NIPPON DENKI KK
发明人
TSUKUDA FUMIAKI
分类号
H01L21/3205;H01L21/82;H01L21/822;H01L21/8238;H01L23/52;H01L27/04;H01L27/092;(IPC1-7):H01L21/823;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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