Electronic grade hydrogen chloride used to produce semiconductor material

摘要

Hydrogen chloride containing methane (CH4) is purified by partially condensing gaseous HCl at 8 - 13 bar overpressure and at a temperature of -22 to -36 deg C. The gaseous part is separated off and the condensed HCl is isolated after evaporation. Also claimed are uses for the hydrogen chloride produced, in (i) the manufacture of semiconductor materials and (ii) the synthesis of trichlorosilane.