| 摘要 |
<p>An interface (11) for transferring wafer carriers between a conveyor (17) and a process chamber load location (21) is provided. The interface has two portions (13, 15). The first portion (13) is configured so that a first wafer carrier moving along a wafer carrier transport mechanism (e.g., a conveyor (17)) may travel therethrough. The second portion (15) is configured so that a second wafer carrier contained within the second portion (15) may index between a first position and a second position without obstructing passage of the first wafer carrier through the first portion (13). The interface (11) contains an indexer/elevator (23) that facilitates wafer carrier coupling and uncoupling from the conveyor (17), and facilitates wafer transfer to and from wafer handlers that load process chambers. Numerous interfaces (11) can be employed to create semiconductor device fabrication systems and to interconnect various semiconductor device fabrication systems (41a, 41b).</p> |
