ROD-FED SOURCE POOL HEIGHT MONITOR

摘要

An evaporated material detector can be used as a pool-height monitor to determine the position of an ingot rod. The detector is a deposition rate monitor that is positioned so that the deposition is strongly dependent on the pool height position. The detector can be positioned near the plane of the crucible for surface. The detector signal gives a strong indication whether the ingot rod is above the crucible surface, and the position of the rod can be modified so as to position the ingot rod slightly above the top surface of a crucible. In this way, the rod position can be maintained, producing a more uniform deposition.