发明名称 METHOD AND APPARATUS FOR CHIP PLACEMENT
摘要 A method and apparatus for accurately registering electronic chip bonding pads (22) with substrate leads (23). Images are developed of different portions of the interface between the electronic chip (16) and the substrate (20) by reflecting collimated, parallel light from the bottom of the chip through transparent areas (24) of the substrate. Image analysis of the composite, superimposed images from spaced positions containing the bonding pads and the leads provide a corrective positioning after which the electronic chip and substrate are brought into contact.
申请公布号 WO9858403(A1) 申请公布日期 1998.12.23
申请号 WO1998US12514 申请日期 1998.06.15
申请人 MICRO ROBOTICS SYSTEMS, INC. 发明人 SRIVASTAVA, NILENDU;DEVASIA, CYRIAC;SUN, SUNG, PING
分类号 H01L21/68;H05K13/04 主分类号 H01L21/68
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