MAGNETIC PARTS AND METHOD FOR USING SAME

摘要

A method for allowing process kits made of magnetic materials to be used for processes that are normally adversely effected by magnetic materials is disclosed. A magnetic part (23) is heated to a temperature near or above the part's Curie temperature prior to beginning processing, and is maintained at a temperature near or above the part's Curie temperature during processing. Preferably the magnetic material is a material that has a low coefficient of thermal expansion at temperatures near or less than the Curie temperature and has a Curie temperature near the operating temperature of the process.