A semiconductor integrated circuit device comprising a first circuit block operated by a supply voltage applied from an external terminal and a second circuit block operated by an internal voltage generated by a power supply circuit, characterized in that a voltage that is higher than the internal voltage in absolute value is generated by a charge pump circuit, that a variable impedance means is provided between the output voltage of the charge pump circuit and the internal voltage, and that the internal voltage is generated by controlling the variable impedance means so that the internal voltage coincides with a reference voltage by allowing a differential amplifier circuit operated by the output voltage of the charge pump circuit to compare both voltages.
