| 摘要 |
<p>A member for a semiconductor equipment of the present invention in which a silicon carbide sintered body is used, the silicon carbide sintered body being obtained by sintering a mixture of silicon carbide powder and a non-metal-based sintering additive, and the density of the silicon carbide sintered body being 2.9 g/cm<3> or more. It is preferable that the specific resistance of the silicon carbide sintered body be 1 OMEGA <.> cm or less, that the thermal conductivity thereof be 200 W/m <.> k or more, and that the total content of impurity elements therein be 1 ppm or less. Further, the member for a semiconductor equipment may be an assembly type. Because the member for a semiconductor equipment of the present invention is formed by the high grade silicon carbide sintered body having high denseness, high purity, high conductivity, and high thermal conductivity, it is easy to manufacture and machine the member. Moreover, the contamination of the semiconductor by the metallic element is prevented, and the member has excellent durability and solvent resistance.</p> |
