| 摘要 |
<p>An XY table provided with an X-axis table (3) supported on a base movably in the X-axis direction, a Y-axis table (12) supported on the base movably in the Y-axis direction, and a top table (20) movable in the X-axis direction together with the X-axis table (3) and also movable in the Y-axis direction together with the Y-axis table (12), and further provided with an armature (6) of a linear motor (5) mounted on an X-axis base (1) supporting the X-axis table (3), a movable element (7) mounted on the back of the X-axis table (3) and opposed to the armature (6), an armature (15) of a linear motor (14) mounted on a Y-axis base (10) supporting the Y-axis table (12), and a movable element (16) mounted on the back of the Y-axis table (12) and opposed to the armature (15). The top table can be positioned with high precision and moved at high acceleration and deceleration.</p> |
