| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular speed detector by which an angular speed can be detected with high precision by means of a simple electrode constitution. SOLUTION: When a driving signal is impressed to driving electrodes 5a, 5b opposed to a vibrator 4, the vibrator 4 is vibrated in the X-axis direction. In this process, a high frequency signal of such a degree that the vibrator 4 cannot be vibrated is superimposed on the driving signal, and this high frequency signal is modulated in compliance with an actual vibration displacement of the vibrator 4. When the modulated high frequency signal is detected, an actual vibration displacement of the vibrator 4 can be detected, so that an electrode for detecting vibration displacement can be dispensed with. |
