| 摘要 |
PROBLEM TO BE SOLVED: To prevent the degradation of the characteristic curve of a sensor element by a method wherein a covering layer is constituted so as to cover not only the surface of a last functional layer in a heating device but also side faces of all functional layers in the heating device. SOLUTION: A composite body 10 comprises many sensor elements 12 on one substrate, and the sensor elements 12 comprise measuring devices which are arranged on a support 14. Heating devices 16 which are used to heat the measuring devices comprise isolation layers 18, 22 as functional layers so as to surround heat conductors 20. In additon, since the width of the isolation layers 18, 22 is smaller than that of the sensor elements 12, recessed parts 26 are generated between the connected heating devices 16. In additon, covering layers 28 which are coated on the heating devices 16 creep into the recessed parts 26, and the isolation layers 18, 22 are surrounded by their end faces 30. Then, the sensor elements 12 are made individual by a cutting process along respective dividing lines 24. Since the coversing layers 28 are cut inside respective regions of the recessed parts 26 in the cutting process, the end faces 30 are not exposed. |
