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发明名称
METHOD AND DEVICE FOR ALIGNMENT
摘要
申请公布号
JPH10333748(A)
申请公布日期
1998.12.18
申请号
JP19970141408
申请日期
1997.05.30
申请人
TOSHIBA CORP
发明人
OTAGURO HIROSHI
分类号
G02F1/13;G02F1/1339;G05D3/00;(IPC1-7):G05D3/00;G02F1/133
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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