| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element, in which the change with the lapse of time such as growth of dark spot and lowering a of luminance is reduced so as to obtain the long lifetime, by manufacturing an organic EL element from a process for forming to a process for sealing with the sealing material without exposing the EL element with the atmospheric air. SOLUTION: Etching is performed to a glass substrate, which is formed with an ITO film as a positive electrode layer over the whole surface, by using hydrochloric acid so as to form a positive electrode layer having the predetermined pattern. The glass substrate is washed by the ultrasonic washing using the aminebase organic compound detergent, and washed by the ultrasonic washing using pure water, and washed with the ammonium hydrogen peroxide solution, and washed with the pure water. Moisture is dried by a nitrogen blower, and finally heated for drying. This washed glass substrate 3 is set in a vacuum chamber 1, and internal pressure of the vacuum chamber 1 is lowered to a vacuum degree at 2×10-6Torr or less, and TPD is used as a deposition source 2 so as to form a hole transport layer. Continuously, Alq3 is used as a deposition source so as to form a light emitting layer. AlLi, which includes Li in the same vacuum condition, is used as a deposition source 2 so as to form a negative electrode layer of a thick film at 2000 nm. |
