发明名称 ROM PROCESS EB DATA VERIFICATION DEVICE AND METHOD
摘要 PROBLEM TO BE SOLVED: To markedly reduce man-power and time required for verifying ROM process EB data by a method wherein the ROM process EB data and ROM process stream data formed basing on ROM data are compared with each other. SOLUTION: A ROM process EB data generating means 11 rearranges ROM data 1 in accordance with address decoder data 4 into an arrangement which is laid on a water and generates a ROM rectangular pattern in accordance with coordinate data 7. In succession, ROM process peripheral layout data 10 is compounded with the ROM rectangular pattern into ROM process EB data. Then, the stream data of the ROM rectangular pattern is formed using the ROM data 1, the address decoder data 4, and the coordinate data 7. Next, the ROM process peripheral layout data 10 is compounded with the ROM rectangular pattern stream data into ROM process stream data. Lastly, a comparison means 16 compares the ROM process EB data with the ROM process stream data.
申请公布号 JPH10335227(A) 申请公布日期 1998.12.18
申请号 JP19970145634 申请日期 1997.06.03
申请人 MITSUBISHI ELECTRIC CORP;MITSUBISHI DENKI SYST LSI DESIGN KK 发明人 KATAOKA TOSHIHIKO
分类号 H01L21/027;H01L21/8246;H01L27/112 主分类号 H01L21/027
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