| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate-processing apparatus, in which there is no possibility of a drive source for driving a movable member becoming corroded and deteriorated with an environment which contains a processing fluid in the construction where the movable member is provided to operate in a processing chamber. SOLUTION: A drive chamber 18 is defined below a top plate 15, and a rodless cylinder 19 is disposed in the drive chamber 18 for opening/closing a shutter 14. The drive force of the rodless cylinder 19 is transmitted to the shutter 14 through a drive transmission shaft 27. The drive transmission shaft 27 extends vertically and is inserted into an opening part 28 formed in the top plate 15. Associated with the opening part 28, there is provided a sealing member 38 for sealing a gap between the drive transmission shaft 15 and the top plate 15. An internal chamber 42 is formed in the drive chamber 18, adjoining the top plate 15, into the chamber 42 of which an inert gas is supplied from an inactive gas supply source as a gas supply means. |
