SEMICONDUCTOR DEVICE AND ITS FAILURE ANALYSIS METHOD,申请号JP19970147869-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND ITS FAILURE ANALYSIS METHOD
摘要
申请公布号	JPH10332778(A)	申请公布日期	1998.12.18
申请号	JP19970147869	申请日期	1997.06.05
申请人	NEC CORP	发明人	FUNATSU TAKESHI
分类号	G01R31/26;G01R31/302;H01L21/66;(IPC1-7):G01R31/26	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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