EPITAXIAL GROWTH APPARATUS,申请号JP19970137161-传众专利搜索

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发明名称	EPITAXIAL GROWTH APPARATUS
摘要
申请公布号	JPH10335250(A)	申请公布日期	1998.12.18
申请号	JP19970137161	申请日期	1997.05.27
申请人	SONY CORP	发明人	OOTSUBO NORIYOSHI
分类号	C23C16/46;C23C16/52;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C16/46
代理机构		代理人
主权项
地址

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