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发明名称
IC TESTER
摘要
申请公布号
JPH10332791(A)
申请公布日期
1998.12.18
申请号
JP19970155862
申请日期
1997.05.29
申请人
ANDO ELECTRIC CO LTD
发明人
WATANABE AKIRA
分类号
G01R31/28;G01R31/00;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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