FIELD DETECTION BY SINGLE PATH DOUBLE AMPLITUDE MODE SCANNING FORCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a method for determining both of data for describing the magnetic field or electric field extending from the surface of a sample in a single path along the surface by a scanning probe and surface roughness. SOLUTION: A scan probe microscope operates in the same manner as an atomic force microsope operates in the intermission period of scanning motion and scans the surface of a sample so that the scanning lines on the surface passes through a probe tip 14, which vibrates interlocked with the surface. Since the probe tip 14 which is vibrating moves separated from the surface 10 of the sample in the period of the intermission of such scanning motion, the amplitude and phase shift of the probe tip 14 is determined by the gradient of the force field extending outside from the surface of the sample. When the probe tip 14 is attracted by the surface of the sample or near magnetic fields or electric fields or repulsed from it, such force field is established. A system memorizes the data expressing the height of the surface of the sample and force field of each sample point.