| 摘要 |
PROBLEM TO BE SOLVED: To permit the door to be opened by one actuator to simplify the structure and reduce the cost. SOLUTION: The door opening mechanism 34 attached to a transport hole of a gas-tight chamber 30 comprises a stopper 33 attached to the chamber 30, door holder 37 attached to an actuator 35, door 38 set in the holder 37 for closing the transport hole through links 39a, 39b, 40a, 40b, and roller 41 attached to the door 38, contacting the stopper. The actuator 35 expands to move the door being energized to ward the holder 37 and the links rotate to contact the door close to the transport hole or return it at the stroke end of the actuator. This lessens control circuit and piping systems for the actuator 35 and reduces the space for the door opening mechanism, without complicating this mechanism, thus reducing the cost. |
