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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH10335310(A)
申请公布日期
1998.12.18
申请号
JP19970141286
申请日期
1997.05.30
申请人
SONY CORP
发明人
TAKATOKU MASATO
分类号
H01L21/302;H01L21/02;H01L21/205;H01L21/265;H01L21/3065;H01L21/336;H01L29/786;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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