| 摘要 |
PROBLEM TO BE SOLVED: To enable high-precision positioning without generating a crack in the insulating substrate. SOLUTION: A process stage part is so constituted that a substrate support stage is on an XYΘstage 21 and limited reflection type laser sensors 4a, 4b, and 4c for detecting the position and attitude of the insulating substrate 3 made of glass, etc., are embedded in the substrate support stage. The insulating substrate 3 while mounted on a substrate reloading arm 5 is kept stationary above the substrate support stage 2, the position relation between the insulating substrate 3 and substrate support stage 2 is detected by the limited reflection type laser sensors 4a, 4b, and 4c, and the XY position and tiltΘof the substrate support stage 2 are adjusted to the XY position and tiltΘof the insulating substrate 3 by driving an X-axial driving motor 6, a Y-axial driving motor 10, and aΘ-axial driving motor 8. Then the insulating substrate 3 is reloaded from the substrate reloading arm 5 to a lift pin 12, which is lowered to suctionally fix the insulating substrate 3 to the substrate support stage 2, thus positioning the insulating substrate 3.
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